机械性能 Mechanical property | |
项目Item | 值Value |
密度ρ (25 °C) Density | 2.2g/cm3 |
泊松比 Poisson's ratio | 1.1 |
弯曲强度 Vickers hardness | 55 |
热学性能 Thermal property | |
项目Item | 值Value |
线性热膨胀系数 Thermal Expansion |
5.5*10-7 |
应变点 Strain Point (°C) |
1700 |
退火点 Anneal Point |
1060 |
Diameter | 2inch | 3inch | 4inch | 5inch | 6inch | 8inch | 12inch |
Thickness (um) | Depends on Request | ||||||
Material | SK1300 | ||||||
Grade/Brand | 小原Ohara® | ||||||
Surface Finished | DSP、SSP、DSL | ||||||
TTV (um) | <5 | <5 | <5 | <5 | <5 | <10 | <15 |
Bow/Warp (um) | <20 | <20 | <30 | <30 | <30 | <40 | <60 |
Ra (nm) | <1 | ||||||
S/D (um) | 40/20 | ||||||
特殊指标: 超平玻璃(Ultra-flat glass wafer) TTV<1um 超薄玻璃(Ultra-thin glass wafer) Thickness:0.1-0.3um 超光滑玻璃(Ultra-smooth glass wafer )Ra≤0.2nm |